Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Youngjun Choi, Daehun Kim +5 more | 2020-11-03 |
| 10758875 | Liquid supply unit, substrate treating apparatus, and method for removing bubbles | Byungsun Bang, Youngjun Choi, Jonghan Kim, Young Jin Jang | 2020-09-01 |
| 10699918 | Chemical supply unit and apparatus for treating a substrate | Buyoung Jung, Gil Hun Song, Sun-Yong Park | 2020-06-30 |