Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Daehun Kim +5 more | 2020-11-03 |
| 10758875 | Liquid supply unit, substrate treating apparatus, and method for removing bubbles | Byungsun Bang, Jin Tack Yu, Jonghan Kim, Young Jin Jang | 2020-09-01 |
| 10651668 | Apparatus and method for controlling power | Seungmin LEE, Heon Chol Kim, Ikhyun CHO | 2020-05-12 |