Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825699 | Standby port and substrate processing apparatus having the same | Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi, Daehun Kim +5 more | 2020-11-03 |
| 10699918 | Chemical supply unit and apparatus for treating a substrate | Jin Tack Yu, Gil Hun Song, Sun-Yong Park | 2020-06-30 |