Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879072 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2020-12-29 |
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Hideaki Tanimura | 2020-09-29 |
| 10784127 | Method of adjusting measurement position of radiation thermometer and heat treatment apparatus | Shinji Miyawaki, Takahiro Kitazawa | 2020-09-22 |
| 10777415 | Heat treatment method for dopant introduction | Hikaru Kawarazaki, Hideaki Tanimura, Shinichi Kato | 2020-09-15 |
| 10643869 | Light irradiation type heat treatment apparatus and heat treatment method | Takahiro Kitazawa | 2020-05-05 |
| 10643850 | Dopant introduction method and thermal treatment method | Hideaki Tanimura, Takayuki Aoyama, Takahiro Yamada | 2020-05-05 |
| 10636676 | Heat treatment method and heat treatment apparatus of light irradiation type | Yukio Ono, Kaoru Matsuo | 2020-04-28 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Hideaki Tanimura +3 more | 2020-03-03 |
| 10573569 | Thermal processing apparatus and thermal processing method through light irradiation | Masashi Furukawa, Hikaru Kawarazaki | 2020-02-25 |