Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura | 2020-09-29 |
| 10777415 | Heat treatment method for dopant introduction | Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2020-09-15 |
| 10658250 | Light irradiation type heat treatment method and heat treatment apparatus | — | 2020-05-19 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Kazuhiko Fuse +3 more | 2020-03-03 |
| 10573569 | Thermal processing apparatus and thermal processing method through light irradiation | Masashi Furukawa, Kazuhiko Fuse | 2020-02-25 |