Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790171 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse | 2020-09-29 |
| 10777415 | Heat treatment method for dopant introduction | Kazuhiko Fuse, Hikaru Kawarazaki, Shinichi Kato | 2020-09-15 |
| 10699906 | Heat treatment method for p-type semiconductor | — | 2020-06-30 |
| 10643850 | Dopant introduction method and thermal treatment method | Takayuki Aoyama, Kazuhiko Fuse, Takahiro Yamada | 2020-05-05 |
| 10580667 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Kazuhiko Fuse +3 more | 2020-03-03 |