Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815569 | Shower head of combinatorial spatial atomic layer deposition apparatus | Yongsung Kim, Jaikwang SHIN, Wooyoung Yang | 2020-10-27 |
| 10541178 | Method and device for evaluating quality of thin film layer | Yongyoung Park, Kideok BAE, Wooyoung Yang, Changseung LEE | 2020-01-21 |