Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815569 | Shower head of combinatorial spatial atomic layer deposition apparatus | Xianyu Wenxu, Yongsung Kim, Wooyoung Yang | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815569 | Shower head of combinatorial spatial atomic layer deposition apparatus | Xianyu Wenxu, Yongsung Kim, Wooyoung Yang | 2020-10-27 |