Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816480 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Eun Hee Jeang, Aleksandr Sergeevich Shorokhov, Anton Sergeevich MEDVEDEV, Maksim Riabko, Sang Woo BAE +3 more | 2020-10-27 |
| 10670968 | Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same | Sang Min Lee, Sang Hyun Park | 2020-06-02 |