Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831082 | Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennas | Alexander Sergeevich Shorokhov, Kirill Igorevich Okhlopkov, Alexandr Igorevich Musorin | 2020-11-10 |
| 10816480 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Eun Hee Jeang, Aleksandr Sergeevich Shorokhov, Anton Sergeevich MEDVEDEV, Sang Woo BAE, Akinori Okubo +3 more | 2020-10-27 |