Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816480 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Eun Hee Jeang, Aleksandr Sergeevich Shorokhov, Maksim Riabko, Sang Woo BAE, Akinori Okubo +3 more | 2020-10-27 |