Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790133 | Precleaning apparatus and substrate processing system | Keum Seok Park, Sun-Jung Kim, Yi Hwan Kim, Dong-Suk Shin, Hyun-Kwan Yu +1 more | 2020-09-29 |
PP
Pan-Kwi Park
Overall (2020): #320,513 of 565,922Top 60%
1
Patents 2020