Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790133 | Precleaning apparatus and substrate processing system | Keum Seok Park, Sun-Jung Kim, Yi Hwan Kim, Pan-Kwi Park, Dong-Suk Shin +1 more | 2020-09-29 |
| 10615162 | Semiconductor device and method for fabricating the same | Won Hyung Kang, Hyo Jin Kim, Sung Bu Min | 2020-04-07 |