Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790133 | Precleaning apparatus and substrate processing system | Sun-Jung Kim, Yi Hwan Kim, Pan-Kwi Park, Dong-Suk Shin, Hyun-Kwan Yu +1 more | 2020-09-29 |
| 10756211 | Semiconductor devices including source/drain regions having multiple epitaxial patterns | Jungho Yoo, Jinyeong Joe, Bonyoung Koo, Dongsuk Shin, Hongsik Yoon +1 more | 2020-08-25 |