Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815392 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai | 2020-10-27 |
| 10640681 | Chemical mechanical polishing composition and method for tungsten | Jia De Peng, Benson Po-Hsiang Chi | 2020-05-05 |
| 10640682 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai, Cheng-Ping Lee | 2020-05-05 |
| 10633557 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai, Cheng-Ping Lee | 2020-04-28 |
| 10633558 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai, Cheng-Ping Lee | 2020-04-28 |
| 10604678 | Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds | Wei-Wen Tsai, Cheng-Ping Lee | 2020-03-31 |
| 10597558 | Chemical mechanical polishing composition and method for tungsten | Jia De Peng, Benson Po-Hsiang Chi | 2020-03-24 |
| 10600655 | Chemical mechanical polishing method for tungsten | Jia De Peng, Syin Hsu | 2020-03-24 |
| 10557060 | Method of chemical mechanical polishing a substrate | Wei-Wen Tsai, Cheng-Ping Lee, Jiun-Fang Wang | 2020-02-11 |