Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640682 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai, Lin-Chen Ho | 2020-05-05 |
| 10633557 | Chemical mechanical polishing method for tungsten | Lin-Chen Ho, Wei-Wen Tsai | 2020-04-28 |
| 10633558 | Chemical mechanical polishing method for tungsten | Wei-Wen Tsai, Lin-Chen Ho | 2020-04-28 |
| 10604678 | Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds | Lin-Chen Ho, Wei-Wen Tsai | 2020-03-31 |
| 10573524 | Method of chemical mechanical polishing a semiconductor substrate | Wei-Wen Tsai, Jiun-Fang Wang | 2020-02-25 |
| 10557060 | Method of chemical mechanical polishing a substrate | Lin-Chen Ho, Wei-Wen Tsai, Jiun-Fang Wang | 2020-02-11 |