Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822524 | Aqueous compositions of low dishing silica particles for polysilicon polishing | Naresh Kumar Penta, Matthew Van Hanehem, Koichi Yoshida, Kyohei Yoshida | 2020-11-03 |
| 10787592 | Chemical mechanical polishing compositions and methods having enhanced defect inhibition and selectively polishing silicon nitride over silicon dioxide in an acid environment | Naresh Kumar Penta, Matthew Van Hanehem | 2020-09-29 |
| 10626298 | Chemical mechanical polishing compositions and methods for suppressing the removal rate of amorphous silicon | Naresh Kumar Penta, Matthew Van Hanehem | 2020-04-21 |
| 10584265 | Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them | Naresh Kumar Penta, Yi Guo, David Mosley, Matthew Van Hanehem | 2020-03-10 |