Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10781343 | Acid polishing composition and method of polishing a substrate having enhanced defect inhibition | Yi Guo | 2020-09-22 |
| 10584265 | Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them | Naresh Kumar Penta, Yi Guo, Matthew Van Hanehem, Kwadwo E. Tettey | 2020-03-10 |