Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822524 | Aqueous compositions of low dishing silica particles for polysilicon polishing | Naresh Kumar Penta, Matthew Van Hanehem, Kwadwo E. Tettey, Koichi Yoshida | 2020-11-03 |