Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838303 | Resist underlayer film forming composition for lithography containing hydrolyzable silane having carbonate skeleton | Makoto Nakajima, Yuichi Goto, Rikimaru Sakamoto | 2020-11-17 |
| 10676491 | Isocyanuric acid derivative having alkoxyalkyl groups and method for producing the same | Shun KUBODERA, Yuichi Goto, Gun SON | 2020-06-09 |
| 10613440 | Silicon-containing EUV resist underlayer film-forming composition containing onium sulfonate | Shuhei Shigaki, Rikimaru Sakamoto | 2020-04-07 |
| 10558119 | Composition for coating resist pattern | Makoto Nakajima, Shuhei Shigaki, Hiroaki Yaguchi, Rikimaru Sakamoto | 2020-02-11 |