Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10613440 | Silicon-containing EUV resist underlayer film-forming composition containing onium sulfonate | Wataru SHIBAYAMA, Rikimaru Sakamoto | 2020-04-07 |
| 10558119 | Composition for coating resist pattern | Wataru SHIBAYAMA, Makoto Nakajima, Hiroaki Yaguchi, Rikimaru Sakamoto | 2020-02-11 |