Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804121 | Substrate treatment apparatus, substrate treatment method, and method for manufacturing substrate | Nobuo Kobayashi | 2020-10-13 |
| 10755384 | Object detection method and object detection system | Yasuhiro Akiyama, Yoshitaka Uchida, Takehito Ogata | 2020-08-25 |
| 10629405 | Electron beam device and sample inspection method | Yasunari Sohda, Momoyo Enyama, Megumi Kimura | 2020-04-21 |