Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761431 | Spatial light modulator, method of driving same, and exposure method and apparatus | Soichi Owa, Tomoharu Fujiwara | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761431 | Spatial light modulator, method of driving same, and exposure method and apparatus | Soichi Owa, Tomoharu Fujiwara | 2020-09-01 |