Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761431 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Soichi Owa | 2020-09-01 |
| 10598606 | Method and device for inspecting spatial light modulator, and exposure method and device | — | 2020-03-24 |