Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877383 | Temperature controlled heat transfer frame for pellicle | Paul Derek Coon | 2020-12-29 |
| 10768341 | Optical material, optical element and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2020-09-08 |
| 10761431 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Tomoharu Fujiwara | 2020-09-01 |
| 10527956 | Temperature controlled heat transfer frame for pellicle | Paul Derek Coon | 2020-01-07 |