Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837763 | Optical assembly, method for producing data in the same, and method for manufacturing structure | — | 2020-11-17 |
| 10794689 | Autofocus system and method | Eric Peter Goodwin | 2020-10-06 |
| 10747117 | Extreme ultraviolet lithography system that utilizes pattern stitching | Michael Binnard, David M. Williamson | 2020-08-18 |
| 10719017 | Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror | Eric Peter Goodwin | 2020-07-21 |
| 10690317 | Illumination device for optimizing polarization in an illumination pupil | Michael Sogard | 2020-06-23 |