Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690317 | Illumination device for optimizing polarization in an illumination pupil | Daniel Gene Smith | 2020-06-23 |
| 10612997 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2020-04-07 |