Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747117 | Extreme ultraviolet lithography system that utilizes pattern stitching | Daniel Gene Smith, David M. Williamson | 2020-08-18 |
| 10712671 | Dense line extreme ultraviolet lithography system with distortion matching | — | 2020-07-14 |