Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10863587 | Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Kyohei ATSUJI, Noboru Nishimura | 2020-12-08 |
| 10631370 | Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft | Asumi NAGAI, Noboru Nishimura | 2020-04-21 |