Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10631370 | Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft | Noboru Nishimura, Yuji Katsuda | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10631370 | Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft | Noboru Nishimura, Yuji Katsuda | 2020-04-21 |