Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10863587 | Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Noboru Nishimura, Yuji Katsuda | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10863587 | Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Noboru Nishimura, Yuji Katsuda | 2020-12-08 |