Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690812 | Optical element and optical system for EUV lithography, and method for treating such an optical element | Dirk Heinrich Ehm, Jeroen Huijbregtse, Arnoldus Jan Storm, Tina Graber, Irene Ament +3 more | 2020-06-23 |