Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10718050 | Concentration control apparatus and material gas supply system | Masakazu Minami | 2020-07-21 |
| D888669 | Terminal metal fitting for conductive plate | Sunghyun BYUN | 2020-06-30 |
| 10655220 | Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system | Yuhei SAKAGUCHI, Masakazu Minami, Daisuke Hayashi | 2020-05-19 |