Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655220 | Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system | Toru Shimizu, Masakazu Minami, Daisuke Hayashi | 2020-05-19 |