Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10718050 | Concentration control apparatus and material gas supply system | Toru Shimizu | 2020-07-21 |
| 10655220 | Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system | Yuhei SAKAGUCHI, Toru Shimizu, Daisuke Hayashi | 2020-05-19 |