Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10773282 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Deepak Vedhachalam, Francois C. Dassapa | 2020-09-15 |
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Shuang Meng +1 more | 2020-03-31 |