Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10773282 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Francois C. Dassapa | 2020-09-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10773282 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Francois C. Dassapa | 2020-09-15 |