Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2020-03-31 |