Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679884 | Film electrode for electrostatic chuck | Edward J. Gratrix, David Casale, Michael K. Aghajanian, Derek S. Rollins | 2020-06-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679884 | Film electrode for electrostatic chuck | Edward J. Gratrix, David Casale, Michael K. Aghajanian, Derek S. Rollins | 2020-06-09 |