Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679884 | Film electrode for electrostatic chuck | Edward J. Gratrix, Prashant G. Karandikar, Michael K. Aghajanian, Derek S. Rollins | 2020-06-09 |
| 10580680 | Methods for masking a pin chuck, and articles made thereby | Edward J. Gratrix, William Spitzmacher, Derek S. Rollins, Robert E. Klinger | 2020-03-03 |