Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792778 | Method for removing contamination from a chuck surface | — | 2020-10-06 |
| 10790181 | Wafer chuck featuring reduced friction support surface | — | 2020-09-29 |
| 10702968 | Machine for finishing a work piece, and having a highly controllable treatment tool | Brian J. Monti | 2020-07-07 |
| 10679884 | Film electrode for electrostatic chuck | Prashant G. Karandikar, David Casale, Michael K. Aghajanian, Derek S. Rollins | 2020-06-09 |
| 10580680 | Methods for masking a pin chuck, and articles made thereby | William Spitzmacher, David Casale, Derek S. Rollins, Robert E. Klinger | 2020-03-03 |