Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763142 | System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter | Marcus Musselman, Juan Valdivia, Hua Xiang, Andrew D. Bailey, III, Qian Fu +1 more | 2020-09-01 |
| 10751705 | Chabazite zeolite with high hydrothermal resistance and method for producing same | Shunji Tsuruta, Akira Nakashima | 2020-08-25 |
| 10618040 | Chabazite zeolite for substrate coating | Shunji Tsuruta, Akira Nakashima | 2020-04-14 |