Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763142 | System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter | Marcus Musselman, Juan Valdivia, Hua Xiang, Andrew D. Bailey, III, Yoko Yamaguchi +1 more | 2020-09-01 |
| 10658194 | Silicon-based deposition for semiconductor processing | Zhongkui Tan, Qing Xu, Hua Xiang, Lin Zhao | 2020-05-19 |