Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Yoshinobu Nakamura, Kosuke Takagi, Yukinao KAGA, Yuji Takebayashi | 2020-05-05 |