Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Masayoshi Minami, Yoshinobu Nakamura, Kosuke Takagi, Yuji Takebayashi | 2020-05-05 |
| 10622213 | Method of manufacturing semiconductor device | — | 2020-04-14 |
| 10559485 | Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium | Ryosuke YOSHIDA | 2020-02-11 |