Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854907 | Fuel cell system | Kimiharu Mizusaki, Hideharu Naito, Masahiro Sato | 2020-12-01 |
| 10767260 | Substrate processing apparatus, vaporization system and mist filter | Atsushi Hirano | 2020-09-08 |
| 10693172 | Manufacturing method of fuel cell stack | Yusuke Nara, Yoshihito Kimura | 2020-06-23 |
| 10686206 | Exhaust apparatus | Kimiharu Mizusaki, Hideharu Naito, Yuki Imamura, Takaaki Mitsuoka, Yuki Makari | 2020-06-16 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Masayoshi Minami, Yoshinobu Nakamura, Yukinao KAGA, Yuji Takebayashi | 2020-05-05 |