Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2020-10-06 |
| 10732515 | Detection and measurement of dimensions of asymmetric structures | Phillip Atkins, Qi Dai | 2020-08-04 |
| 10678226 | Adaptive numerical aperture control method and system | Qiang Wang, Xin Li, Qiang Zhao | 2020-06-09 |
| 10648793 | Library expansion system, method, and computer program product for metrology | Leonid Poslavsky | 2020-05-12 |