Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629427 | Bevel etch profile control | Zonghui SU, Abdul Aziz Khaja, Jeongmin Lee | 2020-04-21 |
| 10599043 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Juan Carlos Rocha-Alvarez, Jeongmin Lee +4 more | 2020-03-24 |