Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10759710 | Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure | Junichi Iwasawa, Hiroaki Ashizawa, Ryoto TAKIZAWA, Toshihiro Aoshima, Yuuki Takahashi +1 more | 2020-09-01 |
| 10714373 | Electrostatic chuck and wafer processing apparatus | Kazuki Anada, Yuichi Yoshii | 2020-07-14 |