Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714373 | Electrostatic chuck and wafer processing apparatus | Yuichi Yoshii, Takuma Wada | 2020-07-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714373 | Electrostatic chuck and wafer processing apparatus | Yuichi Yoshii, Takuma Wada | 2020-07-14 |